GRAPHENE INSPECTION APPARATUS AND SYSTEM USING THE SAME

摘要

PURPOSE: A graphene inspecting device and a graphene inspecting system using the same are provided to detects defects of a grapheme in short time with a simple configuration, thereby enhancing the efficiency of a grapheme quality inspection of a large area massively produced. CONSTITUTION: A graphene inspecting device comprises a current applying unit(110), a data acquisition unit(120), and a detecting unit(130). The current applying unit applies current to a grapheme. The data acquisition unit obtains heat distribution data of the grapheme in which the current is applied. The detecting unit detects the existence of the defects of the grapheme based on the heat distribution data.