| 摘要 |
PURPOSE: A method for forming a selective emitter of a solar battery is provided to omit a separate subsequent process by eliminating a mask pattern through a dry etching process, thereby improving processing efficiency. CONSTITUTION: A high concentration impurity region is formed inside a substrate with constant depth. A mask pattern(205) is formed on the substrate of a region for forming a high concentration emitter(206) with a screen printing method. The top area of the substrate including the mask pattern is dry-etched. A low concentration emitter(207) is formed in a region which does not includes the mask pattern. The high concentration emitter is formed in the region which includes the mask pattern. |
