| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical waveguide electro-optical element capable of preventing beam shape distortion of light beam which transmits the inside of the electro-optical element from occurring by suppressing injection of electric charges into an electro-optical material to be a core layer. <P>SOLUTION: An electro-optical element 1 of the present invention is composed of an optical waveguide 2 having a thin film made of an electro-optical material as a core layer 4, and dielectric clad layers and electrode layers 7a, 7b laminated in order on the core layer 4. The dielectric clad layers include first clad layers 5a, 5b and second clad layers 6a, 6b. A dielectric constant of the second clad layers 6a, 6b is larger than a dielectric constant of the first clad layers 5a, 5b, and a film thickness 6d<SB POS="POST">cl</SB>of the second clad layers 6a, 6b is larger than a film thickness 5d<SB POS="POST">cl</SB>of the first clad layers 5a, 5b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
