PIEZOELECTRIC ELEMENT

摘要

A piezoelectric element has a metallic substrate, an alumina layer, a lower electrode, a piezoelectric body layer, and an upper electrode. The metallic substrate contains iron as the main component and also contains at least aluminum and chromium. The alumina layer is formed on the metallic substrate, and the lower electrode is formed on the alumina layer. The piezoelectric body layer is formed on the lower electrode, and the upper electrode is formed on the piezoelectric body layer. The alumina layer consists mainly of particles of a ?-alumina phase.