APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE

摘要

The invention refers to a probe assembly (310) for a scanning probe microscope (100) which comprises at least one first probe (315, 320) adapted for analyzing a specimen (120, 620), at least one second probe (325, 330, 335) adapted for modifying the specimen(120, 620) and at least one motion element (370) associated with the probe assembly (310) and adapted for scanning one of the probes (315, 320) being in a working position across a surface of the specimen (120, 620) so that the at least one first probe (315, 320) interacts with the specimen (120, 620) whereas the at least one second probe (325, 330, 335) is in a neutral position in which it does not interact with the specimen (120, 620) and to bring the at least one second probe (325, 330, 335) into a position so that the at least one second probe can modify a region of the specimen (120, 620) analyzed with the at least one first probe (315, 320).