| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrector which is suitable for transmission electron microscopes and is insensitive to fluctuations in the electrical energy supply. <P>SOLUTION: The invention concerns a corrector (9) for chromatic and aperture aberration correction in an electron microscope with six multipoles (1, 2, 3, 4, 5, 6) which are disposed in the optical path (7) one after the other symmetrically with respect to a symmetry plane (8) for generating quadrupole fields (1', 2', 3', 4', 5', 6') and octupole fields, in which the quadrupole fields (1', 2', 3', 4', 5', 6') of all six multipoles (1, 2, 3, 4, 5, 6) are orderly rotated through 90° with respect to one another, thereby generating a mirror-symmetrical exchange symmetry of axial fundamental rays (x<SB POS="POST">α</SB>, y<SB POS="POST">β</SB>). <P>COPYRIGHT: (C)2012,JPO&INPIT |
