发明名称 Semiconductor Device Comprising Self-Aligned Contact Elements and a Replacement Gate Electrode Structure
摘要 When forming sophisticated semiconductor devices including high-k metal gate electrode structures, a raised drain and source configuration may be used for controlling the height upon performing a replacement gate approach, thereby providing superior conditions for forming contact elements and also obtaining a well-controllable reduced gate height.
申请公布号 US2012211844(A1) 申请公布日期 2012.08.23
申请号 US201213371049 申请日期 2012.02.10
申请人 GLOBALFOUNDRIES INC. 发明人 SCHLOESSER TILL;BAARS PETER;JAKUBOWSKI FRANK
分类号 H01L29/772;H01L21/28;H01L21/336 主分类号 H01L29/772
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