| 摘要 |
<p>Provided is a line width measurement device that can accurately and efficiently measure a measurement subject. The line width measurement device (100), which measures the line width of a pattern to be measured, is provided with: a camera (30) that images the pattern to be measured; a camera moving device (32); and a control device (40) that controls the movement of the camera moving device (32). The control device (40) is connected to a recording device (50) that stores an image analysis program (52) that performs image analysis on a pattern imaged by the camera (30). The control device (40) is connected to an accumulated data saving device (55) that accumulates data of movement deviation between the position of the camera (30) moved by the camera moving device (32) and the position of a predetermined pattern imaged by the camera (30). The control device (40) controls the movement of the camera moving device (32) on the basis of the data of movement deviation accumulated in the accumulated data saving device (55).</p> |
