摘要 |
In an embodiment in accordance with the present invention, a semiconductor device includes a vertical channel region, a gate at a first depth on a first side of the vertical channel region, a shield electrode at a second depth on the first side of the vertical channel region, and a hybrid gate at the first depth on a second side of the vertical channel region. The region below the hybrid gate on the second side of the vertical channel region is free of any electrodes. |