发明名称 CONTINUOUSLY SCANNING XY TRANSLATION STAGE
摘要 An XY translation stage includes a primary drive mechanism and a stage drive assembly. The primary drive mechanism rotates the stage drive assembly about an axis of rotation. The XY translation stage also includes an object stage that orbits freely in a defined plane without rotation of the object stage out of that defined plane. A stage pin associates the stage drive assembly with the object stage such that rotational movement of the stage drive assembly yields orbital movement of the object stage within the defined plane. The positioning of the stage pin relative to the axis of rotation is adjustable such that the diameter of the orbital movement of the object stage is adjustable.
申请公布号 WO2012112138(A1) 申请公布日期 2012.08.23
申请号 WO2011US24849 申请日期 2011.02.15
申请人 NANOTRONICS IMAGING, LLC;PUTMAN, MATTHEW, C.;PUTMAN, JOHN, B. 发明人 PUTMAN, MATTHEW, C.;PUTMAN, JOHN, B.
分类号 B23Q1/48;B23Q1/62 主分类号 B23Q1/48
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