PROCESS AND STRUCTURES FOR FABRICATION OF SOLAR CELLS
摘要
Contact holes of solar cells (420) are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film (424) that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
申请公布号
WO2012112191(A1)
申请公布日期
2012.08.23
申请号
WO2011US52313
申请日期
2011.09.20
申请人
SUNPOWER CORPORATION;HARLEY, GABRIEL;SMITH, DAVID D;DENNIS, TIM;WALDHAUER, ANN;KIM, TAESEOK;COUSINS, PETER JOHN
发明人
HARLEY, GABRIEL;SMITH, DAVID D;DENNIS, TIM;WALDHAUER, ANN;KIM, TAESEOK;COUSINS, PETER JOHN