MULTI-POLE SWITCH STRUCTURE, METHOD OF MAKING SAME, AND METHOD OF OPERATING SAME

摘要

A multi-pole switch comprising a conducting substrate; at least three field electrodes mounted above, and electrically isolated from, each other and from said conducting substrate; a conductive cantilever element having a first end portion secured to said conducting substrate, an opposite second free end portion positioned in spaced relation to said field electrodes and operable in response to an electrostatic or electrodynamic charge established between said cantilever element and said field electrodes to deflect in a direction towards said field electrodes; and a plurality of contact electrode poles mounted above, and electrically isolated from, said conducting substrate below the top of said cantilever element second free end portion and above said field electrodes and positioned to contact said cantilever element as said cantilever element is deflected in a direction defined by the net field applied by said field electrodes.