发明名称 SUBSTRATE-PROCESSING METHOD
摘要 <p>The present invention relates to a substrate-processing method, which imparts a uniform roughness to the back surface of the substrate using sand blasting. The substrate-processing method includes: a slicing step of slicing an ingot into a wafer shape; a sand blasting step of spraying a polishing material onto at least one surface from among the two surfaces of the substrate sliced into the wafer shape so as to perform sand blasting; a heat treatment step of heat-treating the sand blasted substrate; and a polishing step of polishing the entirety of a surface of the heat-treated substrate. Here, the heat treatment step is performed at a temperature of around 900°C to around 1600°C.</p>
申请公布号 WO2012111869(A1) 申请公布日期 2012.08.23
申请号 WO2011KR01232 申请日期 2011.02.23
申请人 HANSOL TECHNICS INC.;KANG, JIN-KI;MA, JAE-YOUNG;PARK, HONG-JIN;LEE, KYOUNG-HO 发明人 KANG, JIN-KI;MA, JAE-YOUNG;PARK, HONG-JIN;LEE, KYOUNG-HO
分类号 H01L21/304 主分类号 H01L21/304
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