| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor element which prevents large decrease in a resistance value due to a temperature rise. <P>SOLUTION: A pressure sensor element includes a piezoelectric element having upper and lower surfaces and a high resistance material film which at least partially covers at least one of the upper and lower surfaces. An electric resistance value of the high resistance material film is larger than that of the piezoelectric element. <P>COPYRIGHT: (C)2012,JPO&INPIT |
