| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a thin film for a solar cell, by which a thin film for a photoelectric conversion element with good crystallinity can be formed even in an atmosphere at atmospheric pressure. <P>SOLUTION: In the method for forming a thin film for a solar cell, by which a thin film containing a plurality of elements is formed on a surface of a workpiece, a raw material solution containing the elements is scattered as particulates in a processing space by an electric field, and the scattered particulates are deposited on the surface of the workpiece to form a thin film. Therefore, the thin film for a photoelectric conversion element with good crystallinity can be formed even in an atmosphere at atmospheric pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
