| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily inspect a groove shape on an inner peripheral surface of a ball screw nut in a short time. <P>SOLUTION: The ball screw nut is supported rotatably by a rotary table 22, and its angle of rotation is measured by a rotary encoder 23. A gage head 3 is supported by an XYZ table 12 freely movably in XYZ directions, displacement in an X-axial direction in which the gage head 3 moves in a direction of the ball screw nut is measured by a linear gage 13, and displacement in a Z-axial direction in which the gage head 3 moves up and down is measured by a dial gage 14. Based upon detection signals of those sensors, position coordinates of the gage head 3 on the ball screw nut are computed so as to measure respective parts of the ball screw nut based upon the position coordinates. <P>COPYRIGHT: (C)2012,JPO&INPIT |
