发明名称 |
SYSTEM FOR MEASURING THE POSITION AND MOVEMENT OF AN OBJECT |
摘要 |
The invention relates to a system (100) for measuring the position of an object (20) in a measurement volume, comprising: an optical angular measurement device (50), disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device (70), disposed with static component, configured for measurement of the range of the object (20) in the measurement volume. It further relates to a use of the system and a measurement method. |
申请公布号 |
WO2012110635(A1) |
申请公布日期 |
2012.08.23 |
申请号 |
WO2012EP52768 |
申请日期 |
2012.02.17 |
申请人 |
NIKON METROLOGY N.V.;VANDENHOUDT, GEERT;BLANCKAERT, PATRICK;THIELEMANS, HANS |
发明人 |
VANDENHOUDT, GEERT;BLANCKAERT, PATRICK;THIELEMANS, HANS |
分类号 |
G01S5/16;G01S3/78;G01S3/783;G01S3/784;G01S17/87 |
主分类号 |
G01S5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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