发明名称 SYSTEM FOR MEASURING THE POSITION AND MOVEMENT OF AN OBJECT
摘要 The invention relates to a system (100) for measuring the position of an object (20) in a measurement volume, comprising: an optical angular measurement device (50), disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device (70), disposed with static component, configured for measurement of the range of the object (20) in the measurement volume. It further relates to a use of the system and a measurement method.
申请公布号 WO2012110635(A1) 申请公布日期 2012.08.23
申请号 WO2012EP52768 申请日期 2012.02.17
申请人 NIKON METROLOGY N.V.;VANDENHOUDT, GEERT;BLANCKAERT, PATRICK;THIELEMANS, HANS 发明人 VANDENHOUDT, GEERT;BLANCKAERT, PATRICK;THIELEMANS, HANS
分类号 G01S5/16;G01S3/78;G01S3/783;G01S3/784;G01S17/87 主分类号 G01S5/16
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