| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spin coater in which liquid chemical is prevented from creeping around to the opposite surface of a substrate. <P>SOLUTION: The spin coater includes: a substrate holding part having a substrate holding stage 20 holding the substrate 1 at the undersurface thereof; a liquid chemical ejection part which is disposed below the substrate holding stage 20 and has liquid chemical ejection nozzles 26 for depositing the liquid chemical on the substrate 1; a liquid chemical recovery part for recovering excessive portion of the liquid chemical; and a circulation mechanism for circulating the excess liquid chemical to the liquid chemical ejection nozzles 26, wherein the liquid chemical ejection part is arranged in such a manner that an interval between the substrate holding stage 20 and the liquid chemical ejection nozzle 26 is 0.5-10 cm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
