INSPECTION SYSTEM AND LIQUID FEEDING DEVICE USED IN THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an inspection system and a liquid feeding device used in the inspection system capable of preventing an inspecting liquid from being attached to parts of an inspection chip excluding its liquid holding parts when the inspection liquid is injected to or sucked from the liquid holding part of the inspection chip by a nozzle member.

SOLUTION: An inspection system 1 using a plurality of inspecting liquids L is provided with: an inspection chip 10 having insertion openings 29 formed on its surface to liquid holding parts 22; a nozzle member 31; a nozzle driving part 33 for moving the nozzle member up and down; a pump 32 for discharging and sucking the inspecting liquid L from the nozzle member 31; and a liquid feeding device 30 having a control part 70. The nozzle member 31 includes a liquid storing part 36 capable of storing the inspecting liquid L, and the control part 70 makes the pump 32 perform suction so that the inspection liquid L is raised in the liquid storing part 36 when the tip of the nozzle member 31 passes the insertion opening 29 as it moves up or down.

COPYRIGHT: (C)2012,JPO&INPIT