| 摘要 |
<p>Provided is a line width measurement device that can accurately and efficiently measure a measurement subject. The line width measurement device (100), which measures the line width of a pattern to be measured, is provided with: a camera (30) that images the pattern to be measured; a camera moving device (32); and a control device (40) that controls the movement of the camera moving device (32). The pattern to be measured is formed on a substrate (10) for a liquid crystal panel of an at-least-four color display. The control device (40) is connected to a recording device (50) that stores an image analysis program (52) that performs image analysis on a pattern imaged by the camera (30). Also, the control device (40) is connected to a camera magnification switching device (55) that switches between a first camera magnification (normal magnification: for example, 50x) for measuring the line width of the pattern to be measured and a second camera magnification (low magnification: for example, 20x) for recognizing a pixel region contained in the substrate (10). After recognizing a pixel region using the camera (30) having the second camera magnification, the control device (40) controls the camera (30) in a manner so as to image the pattern to be measured using the camera (30) having the first camera magnification.</p> |
