发明名称 SEMICONDUCTOR DEVICES HAVING PLANARIZED INSULATION LAYERS AND METHODS OF FABRICATING THE SAME
摘要 A semiconductor device and a method of fabricating a semiconductor device including a step of providing a substrate having a first region and a second region adjacent to each other, a step of forming a structure on the substrate in the first region, the structure including a top surface and a sidewall, a step of forming a first insulation layer on the substrate including the structure, the first insulation layer including a first top surface in the first region, an inclined sidewall on the sidewall of structure, and a second top surface in the second region, a step of forming a second insulation layer on the first insulation layer, and a step of planarizing the second and first insulation layers to form a common planarized surface.
申请公布号 US2012214316(A1) 申请公布日期 2012.08.23
申请号 US201213398895 申请日期 2012.02.17
申请人 BAE JIN-WOO;HWANG INSEAK;HAN MYANGSIK;PARK SE JUNG;CHO SUNG-MIN;KOH YOUNGHO;HONG YI KOAN 发明人 BAE JIN-WOO;HWANG INSEAK;HAN MYANGSIK;PARK SE JUNG;CHO SUNG-MIN;KOH YOUNGHO;HONG YI KOAN
分类号 H01L21/31 主分类号 H01L21/31
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