发明名称 OPTICAL WAVEGUIDE SUBSTRATE HAVING POSITIONING STRUCTURE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING OPTO-ELECTRIC HYBRID SUBSTRATE
摘要 In the optical waveguide board, simultaneously with pattern formation of mirror members at arbitrary positions on a clad layer 11, guiding patterns 14 having convex shapes are formed respectively at arbitrary positions on peripheral parts of mirror patterns 13, and the mirror patterns 13 are worked into tapered shapes. Next, in a state that a mask member 100 having through holes at desired positions, and the guiding patterns 14 are guided by mating, a metal film is formed on surfaces of slope parts 22 of the mirror patterns and the guiding patterns 14. Furthermore, in a state that the guiding patterns 14 and the photomask 16 are guided, wiring core patterns 20 are formed on the clad layer 11 adjacent to the mirror patterns 13.
申请公布号 US2012213470(A1) 申请公布日期 2012.08.23
申请号 US201013503226 申请日期 2010.10.19
申请人 MATSUOKA YASUNOBU;SUGAWARA TOSHIKI 发明人 MATSUOKA YASUNOBU;SUGAWARA TOSHIKI
分类号 G02B6/12;B29D11/00;H01L31/18 主分类号 G02B6/12
代理机构 代理人
主权项
地址
您可能感兴趣的专利