| 摘要 |
<p>Provided is an imprinting apparatus such that fluctuation in the dimensions of a stamper due to heat is prevented, and manufacturing cost is reduced. The imprinting apparatus (10) positions a stamper (56) having a recess/protrusion pattern at the surface thereof over an ultraviolet-curable resin material (54) supplied on a substrate (52), presses the stamper (56) by using fluid to apply pressure to the back face of the stamper (56), cures the ultraviolet-curable resin material (54) by irradiating ultraviolet rays thereupon, and forms a recess/protrusion pattern on the surface of the substrate (52). The imprinting apparatus is characterized by comprising a holding member (14) that holds the substrate (52), and a pressure- resistant body (12) facing the holding member (14), said pressure-resistant body (12) being provided with, on the bottom section thereof, LEDs (16) for irradiating ultraviolet rays upon the ultraviolet-curable resin material (54), and the bottom section of the pressure-resistant body (12) and the holding member (14) being arranged in opposition to each other.</p> |
