发明名称 METHOD FOR PRODUCING CURABLE COMPOSITION FOR IMPRINTS
摘要 <p>PURPOSE: A manufacturing method of a curable composition for imprint is provided to have excellent spreadability and to effectively restrain pattern release. CONSTITUTION: A manufacturing method of a curable composition for imprint containing polymerizable monomer, a polymerization initiator, and a solvent comprises a step of preparing a liquid containing at least one kind of a compound selected from a group consisting of the polymerizable monomer and the polymerizable initiator, passing the liquid into a filter and mixing with a solvent, or a step of preparing two kinds or more of liquids containing at least one kind of a compound selected from the polymerizable monomer and the polymerizable initiator, passing the respective liquids into a filter, and mixing with the solvent.</p>
申请公布号 KR20120093773(A) 申请公布日期 2012.08.23
申请号 KR20120014121 申请日期 2012.02.13
申请人 FUJIFILM CORPORATION 发明人 ENOMOTO YUICHIRO;KODAMA KUNIHIKO;TARUTANI SHINJI
分类号 C08F20/10;C08F20/22;G03F7/20;H01L21/027 主分类号 C08F20/10
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