| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an autofocus device capable of appropriately measuring even when the surface of a measuring object has a level difference part. <P>SOLUTION: An autofocus device includes: a light source; an optical part arranged between the light source and a measuring object and allowing emission light from the light source and return light from the measuring object to pass so as to follow a same optical path; and a detection means for performing focus detection by the return light passing through the optical part. The optical part includes: a tube lens making the emission light from the light source into parallel light; a light shape deformation means for deforming the parallel light from the tube lens into a line shape; an object lens for condensing a line-shaped pattern image on the surface of the measuring object by line-shaped light from the light shape deformation means; and a turning means for turning the line-shaped pattern image condensed by the object lens by a prescribed angle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
