| 摘要 |
PURPOSE: An etching tank cooling and a heating system is provided to easily circulate heated water or cooling water through a cooling and heating pipe inside the etching tank. CONSTITUTION: An etching tank cooling and heating system comprise an etching tank(10), a cooling and heating pipe(20), and cooling tools(31, 33, 35, 37, 39) and heating tools(41, 42, 43, 45, 47, 49). The etching tank provides the etchant for glass etching process to an etching processing chamber and collects etchant spilled out from the etching process chamber. The cooling and heating pipe is arranged inside the etching tank and is used as both a cooling water flowing pipe and a heating water flowing pipe. The cooling method circulates the cooling water in the cooling and heating pipe. The etchant accepted to the etching tank is cooled by using the cooling method. The heating method circulates the heated water in the cooling and heating pipe. The etchant accepted to the etching tank is heated by using the heating method. |
