| 摘要 |
The present invention provides a technique for vertically aligning a carbon nanotube array, which can improve vertical alignment at the bottom of the carbon nanotube array during growth of carbon nanotubes on a substrate. For this purpose, the present invention provides a method of vertically aligning a carbon nanotube array, the including: allowing carbon nanotubes to be grown on a substrate fed to a reactor and synthesized into a carbon nanotube array; and reducing the internal pressure of the reactor after (e.g., immediately after) synthesis of the carbon nanotube array to remove (e.g., instantly remove) a carbon source gas remaining in the reactor, thereby improving vertical alignment at the bottom of the carbon nanotube array.
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