STRESS SENSOR FOR MEASURING MECHANICAL STRESSES IN A SEMICONDUCTOR CHIP AND STRESS COMPENSATED HALL SENSOR

摘要

A stress sensor (1) for detecting mechanical stress in a semiconductor chip (2) has a Wheatstone bridge formed by four integrated resistors R1 to R4, the resistors R1 and R4 being p-type resistors and the resistors R2 and R3 being n-type resistors.