RAW MATERIAL SUPPLY DEVICE AND FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a raw material supply device capable of forming a thin film consisting of a compound semiconductor on a surface of an object to be processed in a face-up state in a molecular beam epitaxy (MBE) film forming device.

SOLUTION: A raw material supply device 62 for supplying raw materials used for manufacturing compound semiconductors comprises: a raw material holder 64 provided on a liquid flow-down surface 90 which extends in a vertical direction and where its outer peripheral surface overflows the liquid; a raw material liquid reservoir 66 provided in the middle in a height direction of the raw material holder and for collecting the raw material liquid as a liquid of the raw material and flowing down the raw material liquid along the liquid flow-down surface 90 by the wettability; and heating means 68 provided in the raw material holder, and for heating the raw material liquid reservoir so that the raw material demonstrates the wettability and heating a tip of the raw material holder to an evaporation temperature of the raw material liquid.

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