| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine structure favorably dealing with a well passing phenomenon of beads while considering "rigidity" and "beads housing properties" or the like. <P>SOLUTION: A plate member having a fine pattern constitute of a plurality of same shaped recessed parts includes at least a first side wall part wherein a side wall surface forming the recessed parts are located on opening surface sides of the recessed parts and a second side wall part located on a bottom surface side of the first side wall part. An inclination angle α1 (the inclination angle of solid part side of the plate member) of the first side wall part to the horizontal surface is smaller than an inclination angle α2 (the inclination angle of the solid part side of the plate member). <P>COPYRIGHT: (C)2012,JPO&INPIT |
