| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce impact when carrying a substrate in a vacuum chamber. <P>SOLUTION: An array antenna type plasma CVD device is provided with a drive pinion 21 connected to the output shaft of a drive motor 20 in a vacuum chamber 1, and carries a substrate carrier 60 in the vacuum chamber 1 by gearing the drive pinion 21 with a rack 64 provided in the substrate carrier 60 to rotate. The drive motor 20 is composed of a vacuum direct drive motor, and the drive pinion 21 is stopped at a prescribed phase. <P>COPYRIGHT: (C)2012,JPO&INPIT |
