| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus or a charged-particle microscope in which even a large-sized specimen can be observed in air atmosphere or gas atmosphere. <P>SOLUTION: The charged particle beam device configured to employ a thin film which partitions vacuum atmosphere and air atmosphere comprises a charged particle optical lens barrel which houses a charged particle optical system, a housing which maintains the passage of a primary charged particle beam emitted from the charged particle optical lens barrel up to the thin film in vacuum atmosphere, and a mechanism which supports the charged particle optical lens barrel and the first hosing for the apparatus installation surface. A housing that has an opening through which a large-sized specimen is carried in, or a mechanism in the shape of a pole, or the like, other than a housing is employed as the support mechanism. <P>COPYRIGHT: (C)2012,JPO&INPIT |
