| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing apparatus performing surface modification by carburizing or the like an object to be treated comprising a metal material using plasma in an inside of a vacuum furnace, capable of optionally changing an electric field strength for plasma generation, thereby improving degree of freedom in surface modification of various objects to be treated. <P>SOLUTION: In order to process an object X to be treated mounted on a tray T at an inside of a vacuum furnace 1 in a plasma processing apparatus, a conductive mesh member 14b of a first feed unit 14 can be connected to an optional position of the object X to be treated or the tray T, and a mesh member 15c of a second feed unit has one end connected to an arc electrode or the like, and can move freely at the inside of the vacuum furnace 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
