| 摘要 |
PURPOSE: A flame hydrolysis deposition apparatus is provided to reduce the waste of materials and enable a continuous process by preventing the scattering of byproducts. CONSTITUTION: A flame hydrolysis deposition apparatus comprises a torch, a scattering prevention unit, and an exhaust pipe. The torch includes branch pipes(23a,23b,23c,23d) through which combustion gas for creating flame and reactive gas are supplied and a protection pipe(21) which is detachably coupled to the bottom of the torch and selectively replaced. The scattering prevention unit is formed on the lower outer side of the torch. The exhaust pipe is connected to a part of the scattering prevention unit and discharges internal gas of the scattering prevention unit. |
