Method of manufacturing MEMS devices providing a control of their cavity depth,申请号EP20080153354-传众专利搜索

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发明名称	Method of manufacturing MEMS devices providing a control of their cavity depth
摘要
申请公布号	EP2157046(A3)	申请公布日期	2012.08.22
申请号	EP20080153354	申请日期	2007.05.16
申请人	QUALCOMM MEMS TECHNOLOGIES, INC	发明人	TUNG, MING-HAU;KOGUT, LIOR
分类号	B81B3/00;B81C1/00	主分类号	B81B3/00
代理机构		代理人
主权项
地址

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