Optical member, method of manufacturing the same, and optical system using the same

摘要

Provided are an optical member capable of maintaining a high level of antireflectiveness while preventing fogging under conditions of total reflection, and a method of manufacturing the same. The optical member includes: a substrate; an intermediate layer; and an aluminum oxide layer which are stacked in this order, the aluminum oxide layer having a surface with an irregular structure made of aluminum oxide crystals. The intermediate layer includes multiple columnar structures inclined with respect to a substrate surface, and includes holes between the columnar structures. The method of manufacturing an optical member includes: forming on a substrate surface an intermediate layer including multiple columnar structures by oblique deposition; and forming a film by applying on the intermediate layer a solution containing aluminum compound and subjecting the film to hot water treatment to form on the film surface an aluminum oxide layer having an irregular structure made of aluminum oxide crystals.