| 发明名称 |
BORON FILM INTERFACE ENGINEERING |
| 摘要 |
Methods of depositing boron-containing liner layers on substrates involve the formation of a bilayer including an initiation layer which includes barrier material to inhibit the diffusion of boron from the bilayer into the underlying substrate. |
| 申请公布号 |
KR20120093139(A) |
申请公布日期 |
2012.08.22 |
| 申请号 |
KR20127001691 |
申请日期 |
2010.06.15 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BALSEANU MIHAELA;XIA LI QUN;WITTY DEREK R.;CHEN YI |
| 分类号 |
H01L21/76 |
主分类号 |
H01L21/76 |
| 代理机构 |
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代理人 |
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