DIGITAL EXPOSURE APPARATUS FOR IDENTIFIABLE SUBSTRATE AND EXPOSURE METHOD THEREBY

摘要

PURPOSE: A substrate recognizing type digital exposure device and an exposure method are provided to irradiate small sized substrates with ultraviolet rays based on digital data by transmitting the digital data based on codes on the substrates. CONSTITUTION: A digital exposure device(100) includes a vision camera part(110), a CAD data extracting part(120), a CAD data transmitting part(130), and a digital micro mirror part(140). The vision camera part detects recognition codes on small sized substrates and identify exposure patterns to detect a plurality of align marks. The CAD data extracting part extracts CAD data matched to the identified exposure patterns and converts the CAD data into digital data. The CAD data transmitting part receives and transmits the digital data. The digital micro mirror part reflects ultraviolet rays based on the digital data and exposes the substrates.