| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating electrode enabling to generate a uniform plasma by charging uniformly electric charges on a surface of a dielectric and reduce a plasma discharge starting voltage as well. <P>SOLUTION: The plasma generating electrode is provided with at least a pair of counter electrodes 1, 1' arranged to face each other with a uniform gap each other, wherein plasma is generated between the counter electrodes 1, 1' by impressing high frequency power on these counter electrodes 1, 1'. On at least one electrode surface of the pair of the counter electrodes 1, 1', a uniformly thick dielectric layer 2 is provided, and in the dielectric layer 2, a plenty of conductive small pieces 7 are dispersed and embedded uniformly along with a face direction of the surface of the dielectric layer 2 with a gap of the size of the conductive small piece. <P>COPYRIGHT: (C)2010,JPO&INPIT |
