发明名称 |
Systems and methods for scanning a beam of light across a specimen |
摘要 |
A system configured to scan a beam of light over a surface of a specimen, comprising a first acousto-optical deflector (44) configured to direct the beam of light at various angles along an angular scan, wherein an amplitude of the first acousto-optical deflector is modulated such that an intensity of the directed light varies over a length of the angular scan; a lens (52) configured to expand the directed beam of light and to convert the angular scan to linear scan; and a second acousto-optical deflector (54) configured as a traveling lens to focus the beam of light onto a scan line.
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申请公布号 |
EP2490064(A1) |
申请公布日期 |
2012.08.22 |
申请号 |
EP20110191074 |
申请日期 |
2002.05.03 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
SULLIVAN, JAMIE;GIBSON, JOHN;LI, MINGGUANG;VELLA, ERIC;JOHNSON, RALPH, THOMAS |
分类号 |
G01B11/30;G02B26/10;G01N21/956;G02B21/06;G02F1/33;G03F7/20;H01L21/027;H01L21/66 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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