发明名称 |
DEPOSITION OF DOPED ZNO FILMS ON POLYMER SUBSTRATES BY UV-ASSISTED CHEMICAL VAPOR DEPOSITION |
摘要 |
The invention provides a method of forming a layer on a polymer substrate comprises a polymer substrate with at least one precursor, and applying ultraviolet light to decompose the at least one precursor and deposit a layer onto the polymer substrate. Also provided is a doped layer comprising zinc oxide deposited on a polymer substrate obtained by introducing at least one precursor comprising zinc and a dopant into a vessel containing a polymer substrate, and applying an ultraviolet light to decompose the at least one precursor and to deposit a layer comprising doped zinc oxide onto the polymer substrate. |
申请公布号 |
EP2489065(A1) |
申请公布日期 |
2012.08.22 |
申请号 |
EP20100824070 |
申请日期 |
2010.10.14 |
申请人 |
ARKEMA, INC. |
发明人 |
XU, CHEN;SILVERMAN, GARY, S.;KOROTKOV, ROMAN, Y.;SMITH, ROBERT, G. |
分类号 |
H01L21/365;C23C16/40;C23C16/48;H01L31/0392;H01L31/18 |
主分类号 |
H01L21/365 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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