发明名称 Method for producing curable composition for imprints
摘要 Provided is a method of producing a curable composition for imprints including (A) a polymerizable monomer, (B) a polymerization initiator, and (C) a solvent which is capable of effectively suppressing lifting or separation of patterns, excellent in coatability, and excellent in time-dependent stability. The method of producing a curable composition for imprints comprises preparing one species of liquid (D) which contains at least either one of the polymerizable monomer (A) and the polymerization initiator (B), passing the liquid (D) through a filter, and then adding the solvent (C).
申请公布号 EP2490072(A2) 申请公布日期 2012.08.22
申请号 EP20120155082 申请日期 2012.02.13
申请人 FUJIFILM CORPORATION 发明人 ENOMOTO, YUICHIRO;KODAMA, KUNIHIKO;TARUTANI, SHINJI
分类号 G03F7/00;G03F7/16 主分类号 G03F7/00
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