发明名称 |
Method for manufacturing a piezoelectric actuator |
摘要 |
<p>There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.</p> |
申请公布号 |
EP2234184(B1) |
申请公布日期 |
2012.08.22 |
申请号 |
EP20100250559 |
申请日期 |
2010.03.24 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
SHIMIZU, HIDEKI;OHNISHI, TAKAO;EBIGASE, TAKASHI;GOTO, NAOKI |
分类号 |
H01L41/09;B81C99/00;H01L41/187;H01L41/257;H02N2/00 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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