| 摘要 |
PURPOSE: A waste sludge storage tank for a semiconductor wafer and a waste sludge reproducing system including the same are provided to prevent the deterioration of inner waste sludge or local carbonization of an inner wall of a tank by including a heating pipe. CONSTITUTION: A waste sludge inlet(140) and a pump(160) are installed on the upper side of a cylindrical tank housing(102). A heater(120) heats waste sludge inputted to a tank and is detachably arranged between an inner wall(108) and an outer wall(104). The heater includes a pair of headers(122,124), a plurality of heating pipes(126), and a heating coil(128). The heating pipe uniformly transmits heat from an inner heating coil to the inner wall.
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