发明名称 Semiconductor device
摘要 A semiconductor device includes an insulating film formed on a substrate; an interconnect layer including a plurality of interconnects formed in the insulating film; and a pad formed on the insulating film. In a region containing at least a part of a section below the pad, a narrow spacing region is formed, where a spacing between the adjacent interconnects is shorter than that in a section outside the region containing at least a part of the section below the pad.
申请公布号 US8247903(B2) 申请公布日期 2012.08.21
申请号 US20100957878 申请日期 2010.12.01
申请人 KODERA KEISUKE;PANASONIC CORPORATION 发明人 KODERA KEISUKE
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
代理机构 代理人
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