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经营范围
发明名称
LAMINAR FLOW TANK
摘要
申请公布号
KR20120092637(A)
申请公布日期
2012.08.21
申请号
KR20127012689
申请日期
2010.11.16
申请人
XYRATEX TECHNOLOGY LIMITED
发明人
MILLER KENNETH C.
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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