发明名称 NITROGEN GAS POWER EJECTION APPARATUS
摘要 PURPOSE: A nitrogen gas power ejector unit is provided to efficiently spray and mix nitrogen gas without a blockage by maximizing a suction phenomenon. CONSTITUTION: A connection pipe(110) is connected to a transfer pipe using a flange(111). A venturi unit(120) forms a venturi section in the connection pipe and includes a first spray unit(121a) and a second spray unit(123a). A high pressure spray nozzle(130) sprays nitrogen gas of high pressure to the venturi section of a connection pipe. A nitrogen gas heater(150) heats the supplied nitrogen gas.
申请公布号 KR20120092275(A) 申请公布日期 2012.08.21
申请号 KR20110012214 申请日期 2011.02.11
申请人 J-SOLUTION CO., LTD. 发明人 LEE, SEUNG YONG
分类号 H01L21/02;H01L21/205;H01L21/3065 主分类号 H01L21/02
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