| 摘要 |
An imprint method includes (i) holding a mold by a first holding portion, (ii) holding, by a second holding portion, a member to be processed so that the member to be processed is capable of bending by its own weight, (iii) supporting, by a support portion, a back surface of the member to be processed in a first area so that an amount of the bending is decreased, (iv) pressing a pattern of the mold against a front surface of the member to be processed, which is supported by the support portion in the first area, (v) supporting, by the support portion, the back surface of the member to be processed in a second area different from the first area, so that the amount of the bending is decreased, by changing a relative position between the member to be processed and the support portion, and (vi) pressing the pattern of the mold against the front surface of the member to be processed, which is supported by the support portion in the second area. |
