IMPROVING THE ADHESIVENESS OF FLUOROCARBON(CFX) FILM BY DOPING OF AMORPHOUS CARBON,申请号KR20127001718-传众专利搜索

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发明名称	IMPROVING THE ADHESIVENESS OF FLUOROCARBON(CFX) FILM BY DOPING OF AMORPHOUS CARBON
摘要
申请公布号	KR20120092545(A)	申请公布日期	2012.08.21
申请号	KR20127001718	申请日期	2010.06.25
申请人	TOKYO ELECTRON LIMITED	发明人	KIKUCHI YOSHIYUKI
分类号	H01L21/312	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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