SUBSTRATE CARTRIDGE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, CONTROL APPARATUS, AND METHOD FOR MANUFACTURING DISPLAY ELEMENT

摘要

Disclosed is a substrate cartridge (1) which is provided with: a main body (2) that houses a sheet substrate (FB); and an information holding unit (IC) that holds information. The holding unit (IC) may be an IC chip or a bar code. The information relates to the specifications (material, thickness, and the like) of the substrate (FB). The information also relates to a process for the substrate (FB). The information also relates to a defect of the substrate (FB). Furthermore, the information is information for identifying the main body (2). The information is displayed on the display unit (29) of the main body (2). The mount unit (3) of the main body (2) is connected to a substrate processing apparatus. The mount unit (3) has a terminal (3C), and communication between the holding unit (IC) and the control unit (104) of the apparatus is performed via the terminal. Also disclosed is a substrate processing method that includes a step of obtaining the information from the holding unit (IC) of the cartridge (1), and a step of processing the substrate (FB) corresponding to the information. The substrate (FB) is a resin film having an organic electroluminescent element formed thereon. The substrate (FB) taken up into the main body (2) is fed through an opening (34).